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    AFM Specifications


Park NX12 Specifications


Z Scanner

Guided high-force flexure scanner

Scan range : 15 µm (optional 30 µm)
Height noise level : 30 pm
0.5 kHz bandwidth, rms (typical)

XY Scanner

Single module flexure XY-scanner with closed-loop control

Scan range : 100 µm × 100 µm



Z stage range : 25 mm (Motorized)
Focus travel range : 15 mm (Motorized)
XY stage travel range : 10 mm x 10 mm (Motorized)


Sample Mount

Sample size :   Open space up to 50 mm x 50 mm, thickness up to 20 mm (Sample size less than 40 x 40 mm recommended using SPM modes)
Sample weight : < 500 g



10x (0.23 NA) ultra-long working distance lens (1 µm resolution)
Direct on-axis vision of sample surface and cantilever
Field-of-view : 840 × 630 µm (with 10× objective lens)
CCD : 5 M Pixel, 1.2 M Pixel (optional)




Dedicated system control and data acquisition software
Adjusting feedback parameters in real time
Script-level control through external programs (optional)


AFM data analysis software



Integrated functions
4 channels of flexible digital lock-in amplifier
Spring constant calibration (Thermal method, optional)
Digital Q control


AFM Modes
(*Optionally available)

Standard Imaging

True Non-Contact AFM
PinPoint™ AFM
Basic Contact AFM
Lateral Force Microscopy (LFM)
Phase Imaging
Tapping AFM

Force Measurement

Force Distance (F/d) Spectroscopy
Force Volume Imaging

Dielectric/Piezoelectric Properties*

Electric Force Microscopy (EFM)
Dynamic Contact EFM (EFM-DC)
Piezoresponse Force Microscopy (PFM)
PFM with High Voltage

Mechanical Properties

Force Modulation Microscopy (FMM)
Nanolithography with High Voltage*

Magnetic Properties*

Magnetic Force Microscopy (MFM)
Tunable Magnetic Field MFM


Electrical Properties

Conductive AFM (C-AFM)*
IV Spectroscopy*
Kelvin Probe Force Microscopy (KPFM)
Scanning Capacitance Microscopy (SCM)*
Scanning Spreading-Resistance Microscopy (SSRM)*
Scanning Tunneling Microscopy (STM)*
Photo Current Mapping (PCM)*

Chemical Properties*

Chemical Force Microscopy with Functionalized Tip
Electrochemical Microscopy (EC-AFM)


AFM Options

Electrochemistry cells

Electrochemistry cell
Electrochemistry toolkit for universal liquid cell

Z Scanner Heads

15 μm Z Scanner AFM head
30 μm Z Scanner AFM head
15 μm Z Scanner SICM module
30 μm Z Scanner SICM module

Electrochemistry options


Environmental Control Options

Live cell chamber

Temperature Control

Temperature Controlled Stage 1
  -25 °C to +170 °C
Temperature Controlled Stage 2
  Ambient to +250 °C
Temperature Controlled Stage 3
  Ambient to +600 °C

Liquid Cells

Universal Liquid Cell
Open or closed liquid cell with liquid/gas perfusion Temperature control range: 0 °C to +110 °C (in air), 4 °C to +70 °C (with liquid)
Electrochemistry Cell
Open Liquid Cell

Liquid Probehand

Designed for imaging in general liquid environment
Resistant to most buffer solutions including acid
Contact and Non-contact AFM imaging in liquid

Magnetic Field Generator

Applies external magnetic field parallel to sample surface
Tunable magnetic field
Range : -300 ~ 300 gauss
Composed of pure iron core & two solenoid coils

Acoustic Enclosure

Stand alone type AE 204

Starter kits for advanced modes

Easy to use for advanced modes Includes specialized probes and samples


Dimensions in mm

NX12 Dimensions