SmartLitho

Park SmartLitho™

An easy user interface for Nanolithography and Nanomanipulation

Park SmartLitho provides an intuitive and flexible environment for nanoscale patterning and manipulation using Park AFMs. Designed to make advanced nanolithography more accessible, it helps users efficiently translate their ideas into precise nanoscale structures for a wide range of research applications.

The easiest operating software available for nanolithography and nanomanipulation

Park SmartLitho, enabled by SmartScan is an AFM based platform that performs nanolithography and nanomanipulation on materials, electrical and electronics devices, nanotechnology and other areas of research. Park SmartLitho software has a variety of lithography modes, supports both Vector mode and Raster mode and operates on the SmartScan platform, which has an easy user interface, and provides a stand-alone convenient drawing editor.

Park SmartLitho™ provides a stand-alone convenient drawing editor

Christmas Ball Lithography on Si

SmartLitho™ mode supported by Park SmartScan

Taegeuk Mark Lithography on PZT