| Contact Us   Global
  • Park
    High vacuum AFM
    Ideal for failure analysis
    and sensitive materials research

Park NX-Hivac

High vacuum atomic force microscope
for failure analysis and ​atmosphere-sensitive materials research

Park NX-Hivac allows failure analysis engineers to improve the sensitivity and repeatability​ of their ​AFM ​measurements through high vacuum ​environment. Because high vacuum ​measurement offers greater accuracy, better repeatability, and less tip and sample damage than ambient or dry N2 conditions, users can measure a wide​r​ range of signal response​ in various failure analysis applications​​, such as dopant concentration of Scanning Spreading Resistance Microscopy (SSRM).

Park NX-Hivac enables materials scientific research that requires ​high accuracy and high resolution measurements in a vacuum environment free from ox​ygen and other agents.

Technical Note: AFM Failure Analysis
Technical Note: Better in Vacuum


Performing Scanning Spreading Resistance Microscopy (SSRM) measurements under high-vacuum conditions can reduce the required tip-sample interaction force, which can significantly reduce damage to both the sample and the tip. This will extend the life of each tip, making scanning cheaper and more convenient, and can provide more accurate results by improving spatial resolution and signal to noise ratio. This makes high vacuum Scanning Spreading Resistance Microscopy (SSRM) measurements conducted with the NX-Hivac an excellent choice for failure analysis engineers looking to increase their throughput, reduce costs, and improve accuracy.


Park Hivac Manager

NX-Hivac auto vacuum control

High vacuum is controlled by Hivac Manger, pumping for the optimized vacuum condition and venting processes are logically and visually controlled by one-button clicking. Each process is visually monitored by color and schematic changes, you would not need to worry about the sequence of vacuum operation after click on a button. Faster and easier vacuum control software brings you ease of use AFM operation and better productivity.


Advanced automation features

The NX-Hivac features a range of tools that minimize the required input from the user. This means you can scan faster and increase your lab’s throughput.


StepScan Automation with Motorized stage

StepScan gives users the ability to program the device to image multiple regions quickly and easily. The NX-Hivac lets you scan a sample in just five steps: Scan, lift cantilever, move motorized stage to user defined coordinate, approach, and repeat. This boosts productivity enormously and reduces required user input to the absolute minimum.


Motorized laser alignment

Park’s motorized laser beam alignment lets the user seamlessly continue automated measurement routines without user input. With our advanced pre-aligned cantilever holder, the laser beam is focused on the cantilever upon tip exchange. The laser spot is then optimized along the X- and Y-axis by motorized positioning knobs.


Increasing accuracy and productivity

Although the NX-Hivac is the world’s most accurate high performance AFM, it is also one of the easiest to use and convenient AFMs for failure analysis applications. With Park NX-Hivac, you can increase your productivity and trust that your results are sound.


Closed-loop XY and Z Scanners

With two independent closed-loop XY and Z flexure scanners for the sample and probe tip, you can rest assured that your scans will be extremely accurate. The NX-Hivac offers flat and orthogonal XY scanning with low residual bow, offering out of plane motion less than 1 nm over the entire scan range. The NX-Hivac also features a high speeds Z scanner with a 15 μm scan range and Z scanner non-linearity is less than 0.5%. This provides accurate 2D and 3D measurements with no need for software processing.


Low Noise XYZ Position Sensors

The NX-Hivac features Park AFM’s industry leading low noise Z detector that can accurately measure sample topography while the low noise XY closed loop scan minimizes the forward and backward scan gap to less than 0.15% of the scan range.

24-bit Digital Electronics


Minimize wasted time and maximize accuracy with the trademark NX Series electronics controller featured in the NX-Hivac. Our controller is an all digital, 24-bit high speed device which gives the user the ability to perform a wide range of scans including our True Non-Contact mode. With its low noise design and high speed processing unit, the controller is ideal for precise voltage and current measurement as well as nano scale imaging. The embedded electronics also feature digital signal processing, allowing users to easily analyze measurements and imaging.


Park NX-Hivac Specifications


Z Scanner

Flexure guided high-force scanner

Scan range: 15 µm (optional 30 µm)

XY Scanner

Single module flexure XY-scanner with closed-loop control
Scan range : 50 µm × 50 µm
(optional 100 µm × 100 µm)



XY stage travel range: 22 mm x 22 mm (Motorized))
Z stage travel range: 24 mm (Motorized)
Focus stage travel range: 11 mm (Motorized)


Sample Mount

Sample size :  : Open space up to 100 mm × 100 mm using single sample and 10 mm × 10 mm using multi samples, thickness up to 20 mm


On-Axis Optics

10x (0.21 NA) ultra-long working distance lens (1 µm resolution)
Direct on-axis vision of sample surface and cantilever
Field-of-view : 840 × 630 µm (with 10× objective lens)
CCD : 5 M pixel


High Vacuum

Vacuum level: Typically less than 1 x 10-5 torr
Pumping speed: Reach to 10-5 torr within 5 min using Turbo & Dry Pump
Vacuum chamber size: 250 mm X 320 mm X 270 mm (Inner dimension W X D X H)




  • AFM system control and data acquisition software
  • Auto mode for quick setup and easy imaging
  • Manual mode for advanced use and finer scan control


  • AFM data analysis software
  • Stand-alone design—can install and analyze data away from AFM
  • Capable of producing 3D renders of acquired data

Hivac Manager

Auto vacuum control software



Integrated functions
4 channels of flexible digital lock-in amplifier
Spring constant calibration (Thermal method)
Digital Q control


Dielectric/Piezoelectric Properties

Electric Force Microscopy (EFM)
Piezoresponse Force Microscopy (PFM)
PFM with High Voltage*

Mechanical Properties

Force Modulation Microscopy (FMM)
Nanolithography with High Voltage*



• Temperature Controlled Stage 2 and 3


Product Image