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SiC MOSFET
Scanning Conditions
- System: NX-Hivac
- Scan Mode: SSRM
- Cantilever: Full diamond (k=27 N/m)
- Scan Size: 2μm×2μm
- Scan Rate: 0.5Hz
- Pixel: 256×512
- Sample Bias: +2.5V
- Scan Mode: SSRM
- Cantilever: Full diamond (k=27 N/m)
- Scan Size: 2μm×2μm
- Scan Rate: 0.5Hz
- Pixel: 256×512
- Sample Bias: +2.5V