norganic Pattern BiFeO3 AM_SKPM self_healing Phosphide Calcite FM_SKPM ElectrostaticForceMicroscopy Etch University_of_Regensburg NusEce semifluorinated_alkane cross section LithiumNiobate Polarization TemperatureControlledAFM SKPM Microchannel Vacuum Polydimethylsiloxane ForceVolumeMapping BloodCell ReflexLens VerticalPFM TungstenDeposition PolyStylene Cancer Polymer Composite UnivMaryland fluorocarbon Nickel Spincast PS_LDPE