Park低杂讯原子力显微镜与长距离滑动平台(Long range sliding stage)技术相结合,创造出原子等级的长距离表面轮廓分析仪器(Atomic Force Profiler, AFP). 最佳轮廓的精度和重复性,使其成为半导体产业先进制造中不可或缺的分析仪器。本次讲座介绍了AFM以及非接触式扫描的基本原理,比较不同表面轮廓分析仪器的差异,再进一步讲解Atomic Force Profiler 模式在不同类型样品的量测及分析方法,以及Atomic Force Profiler大范围扫描在产业界的研究及应用的优势与发展。
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