Sample Mounts
The sample mount allows you to place various types of sample for the AFM measurement. It provides easier means to fix and access the sample.
Multi Sample Chuck
- Sample plate to load multiple small samples for automated sequential scanning
- Up to 16 samples of less than 10 mm × 10 mm, 20 mm thickness each
- Sample weight: less than 200 g (in total)
150-mm Vacuum Sample Chuck
- Sample size: 2, 4, 6 inch wafers, and up to 10 × 10 mm of arbitrary shape, 20 mm thickness
- Sample weight: less than 500 g
Tilting Sample Chuck
- Sample plate to tilt the sample for sidewall measurements
- Tilting angle: 10, 15, and 20°
- Sample size: 20 mm × 20 mm, 2 mm thickness
- Sample weight: less than 200 g
Non-magnetic Sample Holder
- A sample holder to hold samples on top of the XY scanner using clips
- Recommended for magnetically sensitive samples and / or configuration
Snap-In Sample Chuck
- Sample chuck to place samples on a repeatable position
- Positioning repeatability: 5 µm in X and Y direction each
Cross-sectional Sample Holder
- Sample holder to vertically mount a cross-sectioned sample held by a metallic clip
- Allowable sample thickness: 3 mm max.
Park AFM Options
Easily customize our AFMs to fit your unique needs
XY scanners
- 10µm x 10µm XY Scanner for NX10
- 50µm x 50µm XY Scanner for NX10
- 100µm x 100µm XY Scanner for NX10
- 100µm x 100µm XY Scanner for NX20
Z scanner heads
- Standard NX AFM Head
- Long Travel NX AFM Head
- SICM Head for NX
- Long Travel SICM Head for NX
Sample Mounts
- Multi Sample Chuck
- 150-mm Vacuum Sample Chuck
- Tilting Sample Chuck
- Non-magnetic Sample Holder
- Snap-In Sample Chuck
- Cross-sectional Sample Holder
Park Acoustic Enclosures
AFMs measure properties at the nanometer scale, so every small factor can have a large effect on accuracy. That’s why Park has developed some of the best acoustic enclosures on the market, isolating the instrument from noise and helping to make Park AFMs the world’s most accurate.
- Park Acoustic Enclosure 203
- Park Active Temperature Control for Acoustic Enclosure 203
- Park Acoustic Enclosure 101
- Park Acoustic Enclosure 201
- Park Acoustic Enclosure 204
Temperature Control
Explore unique phenomena of polymers and biological samples with our selection of temperature control options.
- Temperature Controlled Stage 1
- Temperature Controlled Stage 2
- Temperature Controlled Stage 3
Environmental Control
Our selection of environmental control units allows you to precisely regulate oxygen content, humidity, CO2 concentration, pH, and temperature. This gives you to the power to insulate highly reactive materials, keep cells alive longer, and do more groundbreaking research.
- Park NX10 GloveBox
- Humidity Control System
- Mbraun Glovebox
- Live Cell Chamber
Liquid Cells
Our selection of liquid cells provide an extensive array of options for biological researchers that need to measure samples immersed in an environment controlled liquid environment.
- Universal Liquid Cell
- Electrochemistry Cell
- Open Liquid Cell
Probehands
Probehands hold the cantilever connect them to the Z scanner. Our selection for the XE head lets you measure a wide range of features, so you can get the data you need to do your best work.
- Standard Probehand
- Clip Type Probehand
- Liquid Probehand
Accessories
To make sure you can conduct more varied and specific research and tests, Park offers an array of additional accessories to further customize your AFM.
- Signal Access Module
- External High Voltage Kit
- Magnetic Field Generator
- Chip Carriers
- Non-magnetic Sample Holder
Park NANOstandard
The calibration standard samples for atomic force microscopy (AFM) and scanning electron microscopy (SEM) measurements.
Manufactured by Kims Reference Corp.
AFM Tip Characterizer (AFMTC)
AFMTC sample consists of 10 Multiple Narrow Trenches (10 ~ 50 nm) and a 50 nm Isolated Line.
This calibration sample provides users with a certified reference material to evaluate the performance for nanoscale narrow trench measurement and the shape characterization of AFM tips.
Specifications :
Trench widths: 10 nm, 13 nm, 16 nm, 19 nm, 22 nm, 26 nm 30 nm, 35 nm, 40 nm, 50 nmLine widths: 50 nm
Step height: 100 nm (not certified)
Pattern length: 4.0 mm (certified region: 3 mm from center)
Material: Polycrystalline silicon
Traceability: KOLAS* (KRISS**) traceable via ISO 17034:2016
High Magnification Calibrator (HMC)
The HMC sample consists of a set of lines that provides five different width and pitch references.
This calibration sample offers users with a certified reference Nanometric Ruler to calibrate the horizontal scale of AFM measurement or SEM magnification. It also comes with a statistical analysis template (an Excel file), an automatic calculation tool that allows users to obtain the calibration parameters accurately and easily.
Specifications :
Line widths (W1~W5): 5 certified values within 20 nm ~ 80 nmPitch values (P1~P5): 5 certified values within 100 nm ~ 900 nm
Step height: 70 nm (not certified)
Pattern length: 4.0 mm (certified region: 3 mm from center)
Material: Polycrystalline silicon
Traceability: KOLAS* (KRISS**) traceable via ISO 17034:2016
Park AFM Accessories
To make sure you can conduct more varied and specific research and tests, Park offers an array of additional accessories to further customize your AFM.
Signal Access Module
Access all the input/output signals for your AFM with the Signal Access Module. The unit provides an easy way to get scanner position, cantilever deflection, driving signal, bias, and other data to use to improve the quality of your work.
Specifications :
Enables access to various input/output signals for AFMScanner driving signal for the XY and Z scanners
Position signal for the XY and Z scanners
Cantilever deflection signals of the vertical/lateral direction
Bias signal for the sample and the cantilever
Driving signal for XE-AFM
Auxiliary input signal to the system
NX12 Stand-alone Base
Supporting base for a system utilization without inverted microscope.
Specifications :
Enables utilizing NX12 system without integration of inverted microscopeRequires active vibration isolation table and acoustic enclosure for optimized system performance
External High Voltage Kit
This accessory provides an applied external bias of up to +/-300V.
Specifications :
Bias range: +/-300VWorks with Conductive AFM, EFM/KPFM/DC-EFM/PFM, and Nanolithography
Magnetic Field Generator
The magnetic field generator lets you apply an external magnetic field to the sample. The field can be changed from -300 gauss to 300 gauss, and is parallel to the sample surface. You can then easily observe changes in the magnetic structure using one of our magnetic force microscopy (MFM) options.
Specifications :
Applying external magnetic field parallel to sample surfaceTunable magnetic field
Range: -300 - 300 gauss
Composed of pure iron core & two solenoid cells
Chip Carriers
Our chip carriers come in several types depending on your needs. We currently offer:
Specifications :
Standard chip carriersMounted type on ceramic plate attached chip carrier
Teflon coated chip carriers for EC-Cell
Ceramic chip carriers for SCM
Ceramic Chip Carrier for SThM
QR Chip Carrier
Specifications :
QR chip carriers for FX40NX-3DM chip carrier
Specifications :
3DM chip carriers for NX-3DMNon-magnetic Sample Holder
Ideal for taking delicate MFM measurements, the non-magnetic sample holder prevents interference from the magnetic field of the standard sample holder.
Park Acoustic Enclosures
AFMs measure properties at the nanometer scale, so every small factor can have a large effect on accuracy. That’s why Park has developed some of the best acoustic enclosures on the market, isolating the instrument from noise and helping to make Park AFMs the world’s most accurate.
Park Acoustic Enclosure 202
Specifications :
Environmentally sealed acoustic enclosure to block external acousticand light noise
Dimensions: 820 × 920 × 1,360 mm (outer dimension, W x D x H)
Weight: 350 kg
* For NX20
Park Acoustic Enclosure 203
The Acoustic Enclosure 203 may come standard with the NX10, but its acoustic isolation performance is anything but. Active vibration isolation, and an ergonomic design make it one of the most effective and easy to use acoustic enclosures on the market.
Specifications :
Includes an active vibration isolation system for extreme vibration isolationErgonomic design for convenient access to the instrument
Dimensions: 700 × 900 × 1,300 mm for NX10
Weight: 300kg for NX10 Standard AE
Active Temperature Control for Park Acoustic Enclosure 203
For those that need precise temperature control and incredible acoustic isolation for their NX AFM. This enclosure maintains a thermally stable environment within 10 minutes of activation.
Specifications :
- Innovative control design brings the enclosure quickly to its temperature equilibrium- Temperature variability of less than 0.1°C within 10 minutes of closing the door
Park Acoustic Enclosure 101
Our easiest to handle AE, the Acoustic Enclosure 101 weighs just 40 kg, while still effectively isolating your AFM from unwanted noise.
Specifications :
Environmentally sealed acoustic enclosure to block external acoustic and light noiseErgonomic design for user convenience
Dimension: 510 × 715 × 630 mm (outer dimension, W x D x H)
Weight: 40 kg
Park Acoustic Enclosure 201
The Acoustic Enclosure 201 isolates the NX system from external acoustic and light noise for exact precision. The unit can also be equipped with an active vibration isolation table for even better performance.
Specifications :
Granite table provides increased vibration isolationBest solution for sub-nanometer scale high resolution imaging
Ergonomic design for a convenient access to the instrument
Dimension: 820 × 920 × 1,345 mm (outer dimension, W x D x H)
* For NX20 Lite
Park Acoustic Enclosure 204
Specifications :
Best solution for high resolution in-liquid imagingErgonomic design for a convenient access to the instrument
Dimension: 880 × 1,000 × 1,500 mm (outer dimension, W x D x H)
Weight: 385 kg
* For NX12
Park Acoustic Enclosure 401
Specifications :
Acoustic enclosure designed for industrial environmentDimension: 880 × 980 × 1,460 mm (outer dimension, W x D x H)
Weight: 595 kg