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    AFM Specifications

Park NX-TSH Specifications

*This specification is customizable. Please consult with Park Systems for more information.


Sample size*

520 mm x 520 mm x 12 mm, 10 kg

Motorized X stage*

travels up to 625 mm, ± 3 µm resolution

Motorized Y stage*

travels up to 525 mm, ± 3 µm resolution

Motorized Z stage*

25 mm Z travel distance, 0.08 µm resolution, < 1 µm repeatability

Motorized Focus Stage*

9 mm Z travel distance for on-axis optics

COGNEX Pattern Recognition

pattern align resolution of 1/4 pixel



XY Range

100 μm × 100 μm

XY Resolution

0.15 nm

Z Range

15 μm

Z Resolution

0.016 nm


AFM and XY Stage
Control Electronics


18 channels
4 high-speed ADC channels
24-bit ADCs for X,Y and Z position sensor



17 channels
2 high-speed DAC channels
20-bit DACs for X,Y and Z positioning




SEMI Standard S2/S8


Vibration, Acoustic Noise, and ESD Performances

Floor Vibration

< 0.5 µm/s (10 Hz to 200 Hz w/ Active Vibration Isolation System)

Acoustic Noise

>20 dB attenuation w/ Acoustic Enclosure


Facility Requirements

Room Temperature (Stand By)

10 °C ~ 40 °C 

Room Temperature (Operating)

18 °C ~ 24 °C


30% to 60% (not condensing)

Floor Vibration Level

VC-D (6µm/sec)

Acoustic Noise

Below 65 dB


Vacuum : -80 kPa
CDA (or N2): 0.7 MPa

Power Supply Rating

208V - 240 V, single phase, 15 A (max)

Total Power Consumption

Consult Park Systems

Ground Resistance

Below 100 ohms



Automatic Tip Exchange (ATX)

Automatic Tip Exchange performs fully automated tip exchanges in order to seamlessly continue automated measurement routines. It automatically calibrates cantilever location and optimizes measurement settings based on measurements of a reference pattern. Our novel magnetic approach to the tip exchange yields a 99% success rate, higher than the traditional vacuum techniques.


Ionization System

Ionization system effectively removes electrostatic charges. It ionizes the charged objects and is very reliable since the system always generates and maintains an ideal balance of positive and negative ions without causing any contamination to the surrounding area. It also reduces the accidental electrostatic built-in charge that may occur during sample handling.


Dimensions & Weight


2334 mm(w) × 1450 mm(d) x 2450 mm(h), 2720 kg approx. (incl. Control Cabinet)
Ceiling Height: 2500 mm or more
Operator Working Space: 3700 mm (w) x 3000 mm (d), Minimum