Park NX-3DM Specifications
System
Specification
Motorized XY stage
200 mm: travels up to 275 mm × 200 mm,
0.5 μm resolution
300 mm:travels up to 400 mm × 300 mm,
0.5 μm resolution, < 1 μm repeatability
Motorized Focus Stage
9 mm Z travel distance for on-axis optics
Motorized Angle Range
-19 degrees and +19 degrees
-38 degrees and +38 degrees
< 0.5 degree angle repeatability
Motorized Z Stage
27 mm Z travel distance
0.08 μm resolution
< 1 μm repeatability
Z Scanner
Z Scanner Range: 15 μm (large mode)
2 μm (small mode)
Z Scanner Resolution: 0.016 nm (large mode)
0.002 nm (small mode)
Z Scanner Noise Floor: < 0.05 nm
Z Scanner Detector Noise: 0.03 nm, rms (typical)
COGNEX Pattern Recognition
pattern align resolution of 1/4 pixel
Scanner Performances
XY Scanner
Single-module flexure XY scanner with closed-loop control
100 µm × 100 µm (Large mode)
50 µm × 50 µm (Medium mode)
10 µm × 10 µm (Small mode)
XY Scanner Resolution
0.28 nm (Large mode)
0.03 nm (Small mode)
Facility Requirements
Room Temperature (Stand By)
10 °C ~ 40 °C
Room Temperature (Operating)
18 °C ~ 24 °C
Humidity
30% to 60% (not condensing)
Floor Vibration Level
VC-D (6µm/sec)
Acoustic Noise
Below 65 dB
Pneumatics
Vacuum : -80 kPa
CDA (or N2): 0.7 MPa
Power Supply Rating
208V - 240 V, single phase, 15 A (max)
Total Power Consumption
2 KW (typical)
Ground Resistance
Below 100 ohms
Options
Automatic Tip Exchange (ATX)
Automatic Tip Exchange performs fully automated tip exchanges in order to seamlessly continue automated measurement routines. It automatically calibrates cantilever location and optimizes measurement settings based on measurements of a reference pattern. Our novel magnetic approach to the tip exchange yields a 99% success rate, higher than the traditional vacuum techniques.
Automatic Wafer Handler (EFEM or FOUP)
The XE-3DM can be further customized by adding an automatic wafer handler (EFEM or FOUP or other). The high-precision, nondestructive wafer handler robot arm fully ensures XE-3DM users to receive fast and reliable wafer measurement automation.
Ionization System
Ionization system effectively removes electrostatic charges. It ionizes the charged objects and is very reliable since the system always generates and maintains an ideal balance of positive and negative ions without causing any contamination to the surrounding area. It also reduces the accidental electrostatic built-in charge that may occur during sample handling.
Dimensions & Weight
200 mm System
1500 mm(w) × 980 mm(d) x 2050 mm(h)
w/o EFEM, 1020 kg approx. (incl. Control Cabinet)
2465 mm(w) × 1000 mm(d) x 2050 mm(h)
w/ EFEM, 1230 kg approx. (incl. Control Cabinet)
Ceiling Height
2500 mm or more
Operator Working Space
3300 mm (w) x 2300 mm (d), Minimum
300 mm System
1840 mm(w) × 1170 mm(d) x 2050 mm(h)
w/o EFEM, 1320 kg approx. (incl. Control Cabinet)
3260 mm(w) × 1350 mm(d) x 2050 mm(h)
w/ EFEM, 2120 kg approx. (incl. Control Cabinet)
Ceiling Height
2500 mm or more
Operator Working Space
4540 mm (w) x 2850 mm (d), Minimum
[ Park NX-3DM 300mm installation layout ]