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Christmas ball lithography on Si substrate

Christmas ball lithography on Si substrate 2

Scanning Conditions

- System: NX10
- Scan Mode: Contact, lithography
- Cantilever: : ContscPt (k=0.2N/m, f=25kHz)
- Scan Size: 30μm×30μm
- Scan Rate: 0.5Hz
- Pixel: 512×512