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21 03 18 PinPointSSRM 1

Nanoscale exploration of field effect transistors for electronic device applications (via PinPoint SSRM)


18 March, 2021

  • 10:00 am – 11:30 am
    London, Dublin
  • 11:00 am – 12:30 pm
    Berlin, Paris, Rome
  • 18:00pm – 19:30 pm
    Seoul, Tokyo
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With the downscaling of electronic devices to the nanoscale, an accurate, high-resolution characterization of structural and electronic properties becomes increasingly important. Atomic Force Microscopy (AFM) offers real space imaging with a nanometer resolution, and not only measures the topographic features, but can simultaneously detect nanomechanical and electrical properties.

The focus of this webinar lies on scanning spreading resistance microscopy (SSRM), a well-established method for measuring doping profiles. The key advantage of SSRM is the high spatial resolution and electronic sensitivity achieved by high loading forces that provide a near-metallic tip-sample conductivity. The downside of the high loading forces is that soft materials can be exposed to smearing effects while scanning, changing the actual sample characteristics.

Combining SSRM with Park Systems’ PinPointTM mode allows overcoming these issues. PinPoint avoids the lateral movement of the tip on the sample surface and thus, prevents smearing of soft materials. Furthermore, the well-defined tip-sample contact reduces topographic crosstalk. We will demonstrate those measurements live on our Park Systems’ NX10 High Resolution AFM on a PFET sample.

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Presented By : 
Dr. Florian Stumpf, Application Manager at Park Systems Europe, Mannheim, Germany

Florian Stumpf is the Application Manager at Park Systems Europe, where he is responsible for the App Team and the measurements of samples or live demos for the research sector. Prior, he worked at the Fraunhofer Institute in Erlangen (Germany) in the group of Mathias Rommel where he was in charge of the AFMs and the communication with Nanoworld. In his position he determined FIB damages and beam tails with Scanning Spreading Resistance Microscopy (SSRM) and Scanning Capacitance Microscopy (SCM). Furthermore, he worked on the development and improvement of a method to determine charge carrier lifetimes in photovoltaic materials with high spatial resolution using Kelvin Probe Force Microscopy (KPFM) and external light sources. During his diploma thesis in nano-sciences he worked on the creation of quantum dots and several methods of characterizing them with an AFM.




Park Lectures - Park Atomic Force Microscope