Park NX-TSH Specifications
*This specification is customizable. Please consult Park Systems for more information.
System
Specification
Sample size*
520 mm x 520 mm x 12 mm, 10 kg
Motorized X stage*
travels up to 625 mm, ± 3 µm resolution
Motorized Y stage*
travels up to 525 mm, ± 3 µm resolution
Motorized Z stage*
15 mm Z travel distance, 0.08 µm resolution, < 1 µm repeatability
Motorized Focus Stage*
9 mm Z travel distance for on-axis optics
COGNEX Pattern Recognition
pattern align resolution of 1/4 pixel
Scanner
Performances
XY Range
100 μm × 100 μm
XY Resolution
0.15 nm
Z Range
15 μm
Z Resolution
0.016 nm
AFM and XY Stage
Control Electronics
ADC
18 channels
4 high-speed ADC channels
24-bit ADCs for X,Y and Z position sensor
DAC
12 channels
2 high-speed DAC channels
20-bit DACs for X,Y and Z positioning
Compliances
CE
SEMI Standard S2/S8
Facility Requirements
Room Temperature (Stand By)
10 °C ~ 40 °C
Room Temperature (Operating)
18 °C ~ 24 °C
Humidity
30% to 60% (not condensing)
Floor Vibration Level
VC-D (6µm/sec)
Acoustic Noise
Below 65 dB
Pneumatics
Vacuum : -80 kPa
CDA (or N2): 0.7 MPa
Power Supply Rating
208V - 240 V, single phase, 17 A (max)
Total Power Consumption
Consult Park Systems
Ground Resistance
Below 100 ohms
