Every year Park Systems takes a part in the largest international trade show for electronics manufacturing in Europe - Semicon EUROPA. Year 2021 is not an exception! We are delighted to announce our participation as an exhibitor in Semicon Europa 2021.
Park Systems, world leading provider of nanoscale metrology equipment, will present its innovative technological hybrid metrology solutions for the needs of the Semiconductor and Hard Disk production
Come and join our Luncheons every SEMICON day at 12:00 pm.
Enjoy the lunch snacks and the seminar on: "New hybrid metrology solutions using advances in automated Atomic Force Microscopy,” presented by Haneol Cho, industrial application scientist at Park Systems Europe, every Semicon day at 12:00 pm.
ABSTRACT:
New hybrid metrology solutions using advances in automated
Atomic Force Microscopy
Whether it is just smaller structures or advanced packaging, novel device architecture comes with new challenges for metrology tools to ensure the quality control for failure-free devices. Not only the accuracy of the metrology measurement is of importance but also the throughput, and therefore the overall efficiency in the process.
Despite being generally considered as a time consuming method, Atomic Force Microscopy (AFM) has been widespread and well-established for many years due to its unparalleled precision in imaging real-space 3D features. With recent improvements in the automation of this powerful technique, more and more possibilities arise to tackle the production challenges for high device densities. By directly integrating this versatile technique into other metrology tools, a holistic pool of information can meet an even broader range of needs to control processes involving narrow or deep trenches, sidewalls, undercuts, layer thicknesses, defect review, hot spot detection, or imaging material properties locally. Learn in this talk how the next generation Park Systems AFM can help to increase your efficiency and give you the insights you need to guarantee the best product for your customer.
Visit our booth B1357 and learn more about significant technological advances from Park Systems for semiconductor applications, such as Automatic Defect Review for Bare Wafers and Substrates or Long Range Profiling for CMP Characterization.
- Event Dates: November 16 – November 19, 2021
- Venue: Neue Messe München, Munich, Germany
- Our location: Booth #B1357
About the SEMICON tradeshows:
The Semicon Europa is Europe's leading showcase for technologies that are at the cutting edge of the microelectronics industry and highlights the areas of research and development. As an information and communication platform it offers high-caliber technical conferences, forums and programs and excellent networking opportunities.