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    AFM Specifications

Park NX20 Specification


Z Scanner

AFM Head
Flexure guided high-force scanner
Scan range: 15 µm (optional 30 µm)

Flexure-guided structure driven by
multiply-stacked piezoelectric stacks
Scan range: 15 µm (optional 30 µm)

XY Scanner

Single module flexure XY-scanner with dual servo closed-loop control
Scan range : 100 µm × 100 µm
(optional 50 µm × 50 µm)



XY stage travel range: 200 mm (Motorized) (150 mm optional), optional precision encoders for better XY stage repeatability
Z stage travel range: 25 mm (Motorized), optional precision encoders for better Z stage repeatability
Focus stage travel range: 15 mm (Motorized)


Sample Mount

Sample size : Up to 150 mm wafer (optional: up to 200 mm wafer) or 1 small sample (10 mm x 10 mm, 20 mm thickness)
Vacuum grooves to hold wafer samples
Up to 16 small samples (10 mm x 10 mm, 20 mm thickness) (Optional Multi Sample Chuck)


On-Axis Optics

10x (0.21 N.A.) ultra-long working distance lens (1µm resolution)
Direct on-axis vision of sample surface and cantilever
Field-of-view : 840 × 630 µm (with 10× objective lens)
CCD : 5 M pixel




• AFM system control and data acquisition software
• Auto mode for quick setup and easy imaging
• Manual mode for advanced use and finer scan control


• AFM data analysis software
• Stand-alone design—can install and analyze data away from AFM
• Capable of producing 3D renders of acquired data



4 channels of flexible digital lock-in amplifier
Spring constant calibration (Thermal method)
Digital Q control


Dielectric/Piezoelectric Properties

Electric Force Microscopy (EFM)
Piezoresponse Force Microscopy (PFM)
PFM with High Voltage*
Contact Resonance PFM (CR-PFM)*

Mechanical Properties

Force Modulation Microscopy (FMM)
Nanolithography with High Voltage*



• Universal Liquid Cell with Temperature Control
• Temperature Controlled Stage 1, 2 and 3
• Electrochemistry Cell
• Glove Box
• High-field Magnetic Field Generator
• Tilting Sample Chuck
• Snap-in Sample Chuck


Dimensions in mm