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  • Park
    PTR Series
    AFM Specifications
 

Park NX-PTR Specifications

System
Specification

Motorized XY stage

travels up to 200 mm × 200 mm, 2 µm repeatability


Motorized Z stage

25 mm Z travel distance
0.1 µm resolution, < 1 µm repeatability


Motorized Focus Stage

15 mm Z travel distance for on-axis optics

Tilting stage

tilt angle: ±1.8°
resolution: 3.28㎚ for 50㎛


Sample Thickness Allowance

up to 20 mm


Full scan range Z run-out

< 2 nm


COGNEX Pattern Recognition

pattern align resolution of 1/4 pixel

 

Scanner Performances

XY Scanner Range

100 µm × 100 µm


XY Scanner Resolution

0.095 nm (20 bit position control)

Z Scanner Range

15 µm

Z Scanner Resolution

0.01 nm

 

AFM and XY Stage
Control Electronics

ADC

18 channels
4 high-speed ADC channels
24-bit ADCs for X,Y and Z scanner position sensor


Maximun Scan Size

4096 x 4096 pixels

DAC

12 channels
2 high-speed DAC channels
20-bit DACs for X,Y and Z scanner positioning

 

Vibration, Acoustic Noise, and ESD Performances

Floor Vibration

< 0.5 µm/s (10 Hz to 200 Hz w/ Active Vibration Isolation System)

Acoustic Noise

>20 dB attenuation w/ Acoustic Enclosure

 

Facility Requirements

Room Temperature (Stand By)

10 °C ~ 40 °C


Room Temperature (Operating)

18 °C ~ 24 °C


Humidity

30% to 60% (not condensing)


Floor Vibration Level

VC-E (3 µm/sec)


Acoustic Noise

Below 65 dB

Pneumatics

Vacuum : -60 kPa


Power Supply Rating

100/120 V/ 208~240 V, single phase, 15 A (max)


Total Power Consumption

2 KW (typical)


Ground Resistance

Below 100 ohms

 

Options

Customized Sample Fixture

Park Systems can prepare customized sample fixtures to support customers’ specific samples, row bars or individual sliders. The customized sample fixture guarantees a superior connection between the measuring sample and the XE-PTR.

 

Automatic Tip Exchange (ATX)

Automatic Tip Exchange performs fully automated tip exchanges in order to seamlessly continue automated measurement routines. It automatically calibrates cantilever location and optimizes measurement settings based on measurements of a reference pattern. Our novel magnetic approach to the tip exchange yields a 99% success rate, higher than the traditional vacuum techniques.

 

Ionization System

Ionization system effectively removes electrostatic charges. It ionizes the charged objects and is very reliable since the system always generates and maintains an ideal balance of positive and negative ions without causing any contamination to the surrounding area. It also reduces the accidental electrostatic built-in charge that may occur during sample handling.

 

Dimensions in mm
& Weight in kg

Acoustic Enclosure

880 (w) × 980 (d) × 1460 (h)
620 kg approx. (incl. basic NX-HDM System)


Control Cabinet

600 (w) × 900 (d) × 1600 (h)
170 kg approx. (incl. controllers)

System Floor Space

1720 (w) × 920 (d)


Ceiling Height

2000 or more


Operator Working Space

2400 (w) × 2450 (d), minimum (dimension unit: mm)

demensions[ Park NX-PTR system dimension ] / [ Park NX-PTR installation layout ]
 

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