Park NX20 Specification
Scanner
Z Scanner
AFM Head
Flexure guided high-force scanner
Scan range: 15 µm (optional 30 µm)
SICM Head
Flexure-guided structure driven by
multiply-stacked piezoelectric stacks
Scan range: 15 µm (optional 30 µm)
XY Scanner
Single module flexure XY-scanner with dual servo closed-loop control
Scan range : 100 µm × 100 µm
(optional 50 µm × 50 µm)
Stage
XY stage travel range: 200 mm (Motorized) (150 mm optional), optional precision encoders for better XY stage repeatability
Z stage travel range: 25 mm (Motorized), optional precision encoders for better Z stage repeatability
Focus stage travel range: 15 mm (Motorized)
Sample Mount
Sample size : Up to 150 mm wafer (optional: up to 200 mm wafer) or 1 small sample (10 mm x 10 mm, 20 mm thickness)
Vacuum grooves to hold wafer samples
Up to 16 small samples (10 mm x 10 mm, 20 mm thickness) (Optional Multi Sample Chuck)
On-Axis Optics
10x (0.21 N.A.) ultra-long working distance lens (1µm resolution)
Direct on-axis vision of sample surface and cantilever
Field-of-view : 840 × 630 µm (with 10× objective lens)
CCD : 5 M pixel
Software
SmartScan™
• AFM system control and data acquisition software
• Auto mode for quick setup and easy imaging
• Manual mode for advanced use and finer scan control
SmartAnalysis™
• AFM data analysis software
• Stand-alone design—can install and analyze data away from AFM
• Capable of producing 3D renders of acquired data
Electronics
4 channels of flexible digital lock-in amplifier
Spring constant calibration (Thermal method)
Digital Q control
Options/Modes
Standard Imaging
True Non-Contact
Contact
Tapping
PinPoint™ AFM
Lateral Force Microscopy (LFM)
Phase Imaging
Scanning Ion Conductance Microscopy (SICM)
Force Measurement
Dielectric/Piezoelectric Properties
Electric Force Microscopy (EFM)
Piezoresponse Force Microscopy (PFM)
PFM with High Voltage*
Contact Resonance PFM (CR-PFM)*
Mechanical Properties
Force Modulation Microscopy (FMM)
Nanoindentation
Nanolithography*
Nanolithography with High Voltage*
Nanomanipulation*
Magnetic Properties
Chemical Properties*
Chemical Force Microscopy with Functionalized Tip
Electrochemical Microscopy (EC-AFM)
Scanning Ion Conductance Microscopy (SICM)
Scanning Electrochemical Cell Microscopy Single Barrel (SECCM Single Barrel)
Scanning Ion Conductance Microscopy-Scanning Electrochemical Microscopy (SICM-SECM)
Current-Distance (I/d) Spectroscopy (with SICM)
Thermal Properties*
Accessories*
• Universal Liquid Cell with Temperature Control
• Temperature Controlled Stage 1, 2 and 3
• Electrochemistry Cell
• Glove Box
• High-field Magnetic Field Generator
• Tilting Sample Chuck
• Snap-in Sample Chuck
Dimensions in mm
