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dielectric trench Chemical Vapor Deposition NTU ito_film NtuEee Conductivity PANI Pzt Heat Nanopattern Terrace Mosfet LFM cannabinoid INSP StainlessSteel SetpointMode HumanHair Chloroform NCM Implant Collagen MultiLayerCeramicCapacitor HafniumDioxide piezoelectric force microscopy Switching MagneticForceMicroscopy FM_SKPM Morphology Roughness CarbonNanotube Wafer ShenYang molecule Vac