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WS2 cooling ring shape self_healing dielectric trench CVD Chloroform Jason blended polymers Chemical Vapor Deposition IVSpectroscopy Varistor PVA Piezoelectric Hafnium_dioxide Ptfe EFM SRAM InorganicCompound MonoLayer Ucl tip_bias_mode DIWafer PinpointNanomechanicalMode optoelectronics fifber amplitude_modulation SKPM WPlug Pinpoint PFM LowDensityPolyethylene ContactModeDots STM Trench ForceVolume