Limitations of Conventional 3D AFM
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Flare Tip |
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Tilted Step-in Tip |
Flat and very wide bottom portion of the tip (>100nm)Innovative XE-3DM Technology Overcomes the Challenges
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High Resolution Access to Undercut and Sidewall
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Image of Undercut Overhang: Metal Overhang Structure
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3D View of High Resolution Sidewall Scan
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Complete 3D Metrology of Sidewall |
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Sidewall Roughness Measurement
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Undercut & Sidewall Characterization
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- Need to measure the sidewall roughness, angle and the width of bottom, middle, and top |
Challenges in Accessing Sidewall
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Conventional AFM cannot get access to the sidewall, especially for overhang features |
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Other methods, such as the flare tips, are insufficient in obtaining the high resolution details of the sidewall due to its dull tip. For a deeper overhang, the bottom width cannot be reached at all. |
For Undercut Characterization and Sidewall Metrology
Continuing the company’s impressive track record of developing optimized solutions, Park Systems introduces XE-3DM, an automatic AFM which revolutionizes the way trench, overhang, and undercut features are scanned and analyzed. The new XE-3DM also makes possible to image soft photoresist structures without deforming or damaging it.
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Advanced Inline Automation Features |
